Shinyoung Kim
at SK Hynix Inc
SPIE Involvement:
Publications (5)

Proceedings Article | 22 February 2021 Poster + Paper
Proceedings Volume 11613, 116130Y (2021)
KEYWORDS: Calibration, Machine learning, Signal processing, Physics, Optical proximity correction, Metrology, Lithography, Computational lithography

Proceedings Article | 24 March 2016 Paper
Proceedings Volume 9778, 97781S (2016)
KEYWORDS: Overlay metrology, Optical proximity correction, Diffraction, Critical dimension metrology, Metrology, Scanning electron microscopy, Electron microscopes, Optical lithography, Error analysis, Target detection

Proceedings Article | 24 March 2016 Paper
Gyoyeon Jo, Sunkeun Ji, Shinyoung Kim, Hyunwoo Kang, Minwoo Park, Sangwoo Kim, Jungchan Kim, Chanha Park, Hyunjo Yang, Kotaro Maruyama, Byungjun Park
Proceedings Volume 9778, 97781J (2016)
KEYWORDS: Overlay metrology, Metrology, Optical testing, Defect inspection, Inspection, Defect detection, Control systems, Semiconductors, Databases, Distortion, Chemical mechanical planarization, Etching

Proceedings Article | 28 March 2014 Paper
Proceedings Volume 9053, 90530J (2014)
KEYWORDS: Photomasks, Optical proximity correction, SRAF, Printing, Semiconducting wafers, 3D modeling, Calibration, Optimization (mathematics), Source mask optimization, Manufacturing

Proceedings Article | 29 March 2013 Paper
Jinhyuck Jeon, Shinyoung Kim, Jookyoung Song, Chanha Park, Hyunjo Yang, Donggyu Yim, Brian Ward, Yunqiang Zhang, Kevin Hooker, Munhoe Do, Jung-Hoe Choi, Stephen Jang
Proceedings Volume 8684, 86840H (2013)
KEYWORDS: SRAF, Atrial fibrillation, Critical dimension metrology, Optical proximity correction, Semiconducting wafers, Photomasks, Model-based design, Manufacturing, Printing, Inspection

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