Dr. Shinichi Hasegawa Profile

Dr. Shinichi Hasegawa

Execuitve Director CTO at Tsukuba Semi Technology Inc

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Publications (2)

Proceedings Article | 17 October 2008 Paper

Phase shift improvement in ArF/KrF haze-free mask cleaning

Shinichi Hasegawa, Tsuneaki Kuwajima, Shirley Zhao, Eric Guo, Keiichi Nemoto, Cathy Liu

Proceedings Volume 7122, 712212 (2008) https://doi.org/10.1117/12.801439

KEYWORDS: Ultraviolet radiation, Phase shifts, Excimers, Photomasks, Scanning probe microscopy, Critical dimension metrology, Air contamination, Mask cleaning, Nitrogen, Scanning electron microscopy

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Proceedings Article | 20 May 2006 Paper

Sulfate-free photomask cleaning technology

Mikio Ishijima, Noriaki Takagi, Shingo Anzai, Hiroaki Morimoto, Tsuneaki Kuwajima, Naotoshi Kawaguchi, Shin-ichi Hasegawa, Toshimitsu Watanabe, Makito Nakatsu, Tomoaki Kamiyama

Proceedings Volume 6283, 62830B (2006) https://doi.org/10.1117/12.681737

KEYWORDS: Ozone, Photomasks, Air contamination, Photoresist processing, Mask cleaning, Transmittance, Signal attenuation, Contamination, Visualization, Halftones

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