Mr. Shinichi Nakajima Profile

Shinichi Nakajima

at Nikon Corp

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Author

Publications (7)

Proceedings Article | 24 March 2006 Paper

Overlay improvement by using new framework of grid compensation for matching

Ayako Sukegawa, Shinji Wakamoto, Shinichi Nakajima, Masaharu Kawakubo, Nobutaka Magome

Proceedings Volume 6152, 61523A (2006) https://doi.org/10.1117/12.656876

KEYWORDS: Semiconducting wafers, Overlay metrology, Distortion, Optical alignment, Lithography, Data processing, Semiconductor manufacturing, Thermal effects, Control systems, Data modeling

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Proceedings Article | 29 April 2004 Paper

Development of customer assistance software for alignment parameter optimization

Yuho Kanaya, Shinichi Nakajima

Proceedings Volume 5378, (2004) https://doi.org/10.1117/12.536104

KEYWORDS: Optical alignment, Semiconducting wafers, Sensors, Signal processing, Error analysis, Software development, Computing systems, Data modeling, Image sensors, Microscopes

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Proceedings Article | 26 June 2003 Paper

Outlier rejection with mixture models in alignment

Shinichi Nakajima, Yuho Kanaya, Mengling Li, Taro Sugihara, Ayako Sukegawa, Nobutaka Magome

Proceedings Volume 5040, (2003) https://doi.org/10.1117/12.485385

KEYWORDS: Expectation maximization algorithms, Statistical analysis, Optical alignment, Computer simulations, Particles, Semiconducting wafers, Neodymium, Lithography, Distortion, Visibility

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Proceedings Article | 2 June 2003 Paper

New method to reduce alignment error by optical system

Tadashi Nagayama, Shinichi Nakajima, Ayako Sugaya, Yuho Kanaya, Ayako Sukegawa

Proceedings Volume 5038, (2003) https://doi.org/10.1117/12.483513

KEYWORDS: Optical alignment, Semiconducting wafers, Monochromatic aberrations, Neodymium, Microscopes, Spatial frequencies, Reflectivity, Chemical mechanical planarization, Phase shifts, Image analysis

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Proceedings Article | 30 July 2002 Paper

Innovative optical alignment technique for CMP wafers

Ayako Sugaya, Yuho Kanaya, Shinichi Nakajima, Tadashi Nagayama, Naomasa Shiraishi

Proceedings Volume 4691, (2002) https://doi.org/10.1117/12.474475

KEYWORDS: Chemical mechanical planarization, Optical alignment, Semiconducting wafers, Algorithm development, Diffraction, Sensors, Reflectivity, Detection and tracking algorithms, Distortion, Reticles

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Proceedings Article | 22 August 2001 Paper

Improving the measurement algorithm for alignment

Shinichi Nakajima, Yuho Kanaya, Akira Takahashi, Koji Yoshida, Hideo Mizutani

Proceedings Volume 4344, (2001) https://doi.org/10.1117/12.436780

KEYWORDS: Optical alignment, Overlay metrology, Signal detection, Detection and tracking algorithms, Image processing, Semiconducting wafers, Wavelet transforms, Microscopes, Picosecond phenomena, Algorithm development

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Proceedings Article | 1 May 2001 Paper

Spectroscopic detection of ammonia using diode-pumped difference-frequency generation

Toshitsugu Ueda, Morio Wada, Tadashi Sugiyama, Shinichi Nakajima, Toshimasa Umezawa, Shoujirou Araki, Takahiro Kudou

Proceedings Volume 4268, (2001) https://doi.org/10.1117/12.424646

KEYWORDS: Infrared radiation, Infrared detectors, Tunable lasers, Infrared photography, Infrared sensors, Sensors, Quantum IR detectors, Semiconductor lasers, Photodiodes, Prototyping

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Showing 5 of 7 publications

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