Mr. Shinichi Nakamura Profile

Shinichi Nakamura

at JSR Corp

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Publications (3)

Proceedings Article | 20 March 2015 Paper

Novel thin film analysis to investigate actual film formation

Kazunori Sakai, Kenji Mochida, Shinichi Nakamura, Tooru Kimura, Kazuhiro Yoshikawa, Naoki Man, Hirofumi Seiki, Masaaki Takeda

Proceedings Volume 9425, 942522 (2015) https://doi.org/10.1117/12.2085717

KEYWORDS: Oxygen, Fluorine, Etching, Process control, Distortion, Photoresist materials, Hydrogen, Thin films, Carbon, Profiling

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Proceedings Article | 27 March 2014 Paper

Photoresist analysis to investigate LWR generation mechanism

Kenji Mochida, Shinichi Nakamura, Tooru Kimura, Kazuki Kawai, Yoshihiko Taguchi, Naoki Man, Hideki Hashimoto

Proceedings Volume 9051, 90511Q (2014) https://doi.org/10.1117/12.2045864

KEYWORDS: Photoresist materials, Line width roughness, Polymers, Lithography, Chemical analysis, Semiconducting wafers, Photoresist processing, Optical lithography, Lithographic illumination, Immersion lithography

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Proceedings Article | 29 March 2013 Paper

Photoresist film analysis to investigate LWR generation mechanism

Shinichi Nakamura, Kenji Mochida, Tooru Kimura, Kana Nakanishi, Naohiko Kawasaki, Naoki Man

Proceedings Volume 8682, 86821H (2013) https://doi.org/10.1117/12.2011394

KEYWORDS: Photoresist materials, Diffusion, Line width roughness, Lithography, Coating, Ions, Photoresist processing, Chemical analysis, Polymers, Transmission electron microscopy

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