Shinichi Shinoda
Researcher at Hitachi Ltd
SPIE Involvement:
Author
Publications (7)

Proceedings Article | 26 March 2019
Proc. SPIE. 10959, Metrology, Inspection, and Process Control for Microlithography XXXIII
KEYWORDS: Lithography, Metrology, Image processing, Inspection, Computer simulations, 3D modeling, Image analysis, Scanning electron microscopy, Image quality, Device simulation

Proceedings Article | 26 March 2019
Proc. SPIE. 10959, Metrology, Inspection, and Process Control for Microlithography XXXIII
KEYWORDS: Metrology, Data modeling, Surgery, Image segmentation, Image processing, Pattern recognition, Feature extraction, Scanning electron microscopy, Shape analysis, Statistical modeling

Proceedings Article | 25 March 2016
Proc. SPIE. 9778, Metrology, Inspection, and Process Control for Microlithography XXX
KEYWORDS: Semiconductors, Metrology, Scanners, Image analysis, Optical fabrication, Scanning electron microscopy, Process control, Shape analysis, Critical dimension metrology, Semiconducting wafers

Proceedings Article | 25 September 2010
Proc. SPIE. 7823, Photomask Technology 2010
KEYWORDS: Semiconductors, Metrology, Silicon, Manufacturing, Bridges, Design for manufacturing, Photomasks, Optical proximity correction, Semiconducting wafers, Resolution enhancement technologies

Proceedings Article | 16 May 2003
Proc. SPIE. 5017, Sensors and Camera Systems for Scientific, Industrial, and Digital Photography Applications IV
KEYWORDS: Digital photography, Imaging systems, Cameras, Sensors, Image processing, Scanners, Image resolution, Digital cameras, Optical character recognition, Electronic imaging

Proceedings Article | 22 October 1999
Proc. SPIE. 3765, EUV, X-Ray, and Gamma-Ray Instrumentation for Astronomy X
KEYWORDS: Electronics, Sensors, Calibration, Crystals, X-rays, Silicon, Collimators, Scintillation, PIN photodiodes, Genetical swarm optimization

Showing 5 of 7 publications
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