Mr. Shinichi Takase Profile

Shinichi Takase

at NTT Advanced Technology Corp

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Author

Publications (2)

Proceedings Article | 17 December 2003 Paper

Focus latitude optimization for model-based OPC

Qi-De Qian, Shinichi Takase

Proceedings Volume 5256, (2003) https://doi.org/10.1117/12.517996

KEYWORDS: Optical proximity correction, Photomasks, Semiconducting wafers, Data modeling, Optical lithography, Lithography, Optimization (mathematics), Manufacturing, Model-based design, Printing

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Proceedings Article | 28 August 2003 Paper

Controlling defocus impact on OPC performance

Shinichi Takase, Qi-De Qian

Proceedings Volume 5130, (2003) https://doi.org/10.1117/12.504380

KEYWORDS: Optical proximity correction, Photomasks, Semiconducting wafers, Data modeling, Optical lithography, Lithography, Manufacturing, Printing, Model-based design, Process modeling

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