Prof. Shin'ichi Warisawa Profile

Prof. Shin'ichi Warisawa

Associate Professor at Univ of Tokyo

SPIE Involvement:

Author

Publications (3)

Proceedings Article | 15 October 2012 Paper

Selectively patterned metal nanodots fabrication by combining block copolymer self-assembly and electron beam lithography

Hiroyuki Suzuki, Reo Kometani, Sunao Ishihara, Shin'ichi Warisawa

Proceedings Volume 8463, 84630U (2012) https://doi.org/10.1117/12.929615

KEYWORDS: Metals, Nanolithography, Picosecond phenomena, Electron beam lithography, Polymers, Thin films, Polymethylmethacrylate, Ultraviolet radiation, Nanostructures, Gold

Read Abstract +

Proceedings Article | 18 March 2009 Paper

Analysis of a relation between the spatial frequency of electrostatic chuck and induced mask inplane distortion (IPD)

Takeshi Yamamoto, Kazuya Ota, Naosuke Nishimura, Shin'ichi Warisawa, Sunao Ishihara

Proceedings Volume 7271, 72713K (2009) https://doi.org/10.1117/12.814451

KEYWORDS: Spatial frequencies, Photomasks, Extreme ultraviolet lithography, Surface roughness, Distortion, Standards development, 3D modeling, Surface finishing, Lithography, Glasses

Read Abstract +

Proceedings Article | 14 August 2006 Paper

Absolute interferometry for surface shapes with large steps by wavelength tuning with a mechanical phase shift

Kenichi Hibino, Yosuke Tani, Toshiyuki Takatsuji, Youichi Bitou, Shinichi Warisawa, Mamoru Mitsuishi

Proceedings Volume 6292, 62920Q (2006) https://doi.org/10.1117/12.679314

KEYWORDS: Interferometry, Ferroelectric materials, Phase shifts, Wavelength tuning, Phase measurement, Phase interferometry, Fizeau interferometers, Beam splitters, Profiling, Silica

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years