Prof. Shin'ichi Warisawa
Associate Professor at Univ of Tokyo
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 15 October 2012
Proc. SPIE. 8463, Nanoengineering: Fabrication, Properties, Optics, and Devices IX
KEYWORDS: Gold, Thin films, Nanostructures, Electron beam lithography, Polymethylmethacrylate, Polymers, Metals, Ultraviolet radiation, Picosecond phenomena, Nanolithography

Proceedings Article | 18 March 2009
Proc. SPIE. 7271, Alternative Lithographic Technologies
KEYWORDS: Lithography, Spatial frequencies, Glasses, Surface roughness, Distortion, 3D modeling, Photomasks, Extreme ultraviolet lithography, Surface finishing, Standards development

Proceedings Article | 14 August 2006
Proc. SPIE. 6292, Interferometry XIII: Techniques and Analysis
KEYWORDS: Beam splitters, Ferroelectric materials, Silica, Interferometry, Phase interferometry, Profiling, Wavelength tuning, Phase measurement, Phase shifts, Fizeau interferometers

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