Shinji Mikami
at EUVL Infrastructure Development Ctr Inc
SPIE Involvement:
Author
Publications (4)

PROCEEDINGS ARTICLE | March 19, 2018
Proc. SPIE. 10583, Extreme Ultraviolet (EUV) Lithography IX
KEYWORDS: Contamination, Metals, Hydrogen, Extreme ultraviolet

PROCEEDINGS ARTICLE | October 16, 2017
Proc. SPIE. 10450, International Conference on Extreme Ultraviolet Lithography 2017
KEYWORDS: Lithography, Mirrors, Contamination, Metals, Scanners, Hydrogen, Zinc, Extreme ultraviolet, Absorbance, Extreme ultraviolet lithography

PROCEEDINGS ARTICLE | March 18, 2016
Proc. SPIE. 9776, Extreme Ultraviolet (EUV) Lithography VII
KEYWORDS: Mirrors, Contamination, Metals, Germanium, Silicon, Hydrogen, Reflectivity, Extreme ultraviolet, Aluminum, Extreme ultraviolet lithography, Chemical elements, Zirconium

PROCEEDINGS ARTICLE | March 19, 2015
Proc. SPIE. 9422, Extreme Ultraviolet (EUV) Lithography VI
KEYWORDS: Mirrors, Scanners, Carbon dioxide lasers, Pellicles, Relays, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Semiconducting wafers, Plasma

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