Shinji Sugatani
General Manager at e-Shuttle Inc
SPIE Involvement:
Author
Publications (11)

Proceedings Article | 26 March 2013
Proc. SPIE. 8680, Alternative Lithographic Technologies V
KEYWORDS: Electron beam lithography, Optical lithography, Silica, Metals, Control systems, Process control, Optical alignment, Electron beam direct write lithography, Semiconducting wafers, Signal detection

Proceedings Article | 26 March 2013
Proc. SPIE. 8680, Alternative Lithographic Technologies V
KEYWORDS: Mirrors, Logic, Lithium, Metals, Logic devices, High volume manufacturing, Analog electronics, Electron beam direct write lithography, Semiconducting wafers, System on a chip

SPIE Journal Paper | 7 August 2012
JM3 Vol. 11 Issue 3
KEYWORDS: Optical alignment, Electron beam direct write lithography, Electron beams, Overlay metrology, Control systems, Semiconducting wafers, Metals, Back end of line, Backscatter, Electron beam lithography

Proceedings Article | 21 March 2012
Proc. SPIE. 8323, Alternative Lithographic Technologies IV
KEYWORDS: Electron beam lithography, Electron beams, Backscatter, Metals, Control systems, Optical alignment, Electron beam direct write lithography, Photoresist processing, Semiconducting wafers, Overlay metrology

Proceedings Article | 21 March 2012
Proc. SPIE. 8323, Alternative Lithographic Technologies IV
KEYWORDS: Information fusion, Semiconductors, Logic, Logic devices, High volume manufacturing, Chemical elements, Analog electronics, Multiplexers, Electron beam direct write lithography, Semiconducting wafers

Showing 5 of 11 publications
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top