Dr. Shintaro Yamada
Sr. Chemist at DuPont Electronics & Imaging
SPIE Involvement:
Author
Publications (17)

Proceedings Article | 22 February 2021 Presentation + Paper
Proc. SPIE. 11612, Advances in Patterning Materials and Processes XXXVIII
KEYWORDS: Carbon, Optical lithography, Etching, Polymers, Image processing, Resistance, Photoresist materials, Absorbance, Reactive ion etching, System on a chip

Proceedings Article | 23 March 2020 Paper
Proc. SPIE. 11326, Advances in Patterning Materials and Processes XXXVII
KEYWORDS: Carbon, FT-IR spectroscopy, Etching, Polymers, X-rays, Resistance, Reactive ion etching, System on a chip, Polymer thin films

Proceedings Article | 23 March 2020 Paper
Proc. SPIE. 11326, Advances in Patterning Materials and Processes XXXVII
KEYWORDS: Carbon, Etching, Polymers, Silicon, Coating, Resistance, Chemical vapor deposition, Reactive ion etching, Thin film coatings, System on a chip

Proceedings Article | 25 March 2019 Paper
Proc. SPIE. 10960, Advances in Patterning Materials and Processes XXXVI
KEYWORDS: Carbon, Etching, Polymers, Coating, Resistance, Chemical vapor deposition, Materials, 193nm lithography

Proceedings Article | 13 March 2018 Paper
Proc. SPIE. 10586, Advances in Patterning Materials and Processes XXXV
KEYWORDS: Lithography, Etching, Dry etching, Polymers, Reflectivity, Ion implantation

Showing 5 of 17 publications
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