Shinya Nagao
at Kagawa Univ
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 6 December 2005
Proc. SPIE. 6050, Optomechatronic Micro/Nano Devices and Components
KEYWORDS: Microelectromechanical systems, Actuators, Optical fibers, Mirrors, Etching, Silicon, Reflectivity, Computer programming, Low pressure chemical vapor deposition, Optical switching

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