Shiyao Zhu
at Shanghai Institute of Optics and Fine Mechanics
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 8 November 2018 Paper
Proc. SPIE. 10818, Holography, Diffractive Optics, and Applications VIII
KEYWORDS: Lithography, Mirrors, Interferometers, Laser applications, Atomic force microscopy, Photoresist materials, Optical encoders, Photomasks, Lutetium, Diffraction gratings

Proceedings Article | 6 November 2018 Paper
Proc. SPIE. 10818, Holography, Diffractive Optics, and Applications VIII
KEYWORDS: Laser sources, Photodetectors, Diffraction, Mirrors, Doppler effect, Interferometers, Interferometry, Distance measurement, Laser stabilization, Diffraction gratings

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