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Shizhu Yuan
at Beijing Institute of Technology
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Publications (1)
Proceedings Article | 5 November 2015
3D profile measurement of micro-structured array with light field microscope
Proc. SPIE. 9795, Selected Papers of the Photoelectronic Technology Committee Conferences held June–July 2015
KEYWORDS: 3D metrology, Microscopes, Microlens array, Objectives, 3D acquisition, Charge-coupled devices, 3D image processing, 3D image reconstruction, Algorithm development, Optical components
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