Dr. Shoumian Cheng
at ICRD
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 20 March 2019
Proc. SPIE. 10961, Optical Microlithography XXXII
KEYWORDS: Lithography, Data modeling, Physics, Feature extraction, Neural networks, Machine learning, Computational lithography, Optical proximity correction, Convolution, Process modeling

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