Dr. Shu Huei Hou
at United Microelectronics Corp
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 15 April 2008 Paper
Proc. SPIE. 6923, Advances in Resist Materials and Processing Technology XXV
KEYWORDS: Lithography, Optical lithography, Reflection, Etching, Metals, Reflectivity, Line width roughness, Immersion lithography, Logic devices, Critical dimension metrology

Proceedings Article | 7 March 2008 Paper
Proc. SPIE. 6924, Optical Microlithography XXI
KEYWORDS: Wafer-level optics, Lithography, Optical sensors, Sensors, Scanners, Finite element methods, Picosecond phenomena, Critical dimension metrology, Semiconducting wafers, Back end of line

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