Dr. Shu Huei Hou
at United Microelectronics Corp
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 15 April 2008
Proc. SPIE. 6923, Advances in Resist Materials and Processing Technology XXV
KEYWORDS: Metals, Lithography, Reflectivity, Optical lithography, Line width roughness, Immersion lithography, Reflection, Logic devices, Critical dimension metrology, Etching

Proceedings Article | 7 March 2008
Proc. SPIE. 6924, Optical Microlithography XXI
KEYWORDS: Semiconducting wafers, Sensors, Picosecond phenomena, Wafer-level optics, Finite element methods, Optical sensors, Back end of line, Critical dimension metrology, Scanners, Lithography

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