Shu-Ping Dong
Associate Engineer at Industrial Technology Research Institute
SPIE Involvement:
Author
Publications (3)

PROCEEDINGS ARTICLE | August 24, 2010
Proc. SPIE. 7767, Instrumentation, Metrology, and Standards for Nanomanufacturing IV
KEYWORDS: Confocal microscopy, Lithography, Light sources, Sensors, Spectroscopy, Inspection, Colorimetry, Image sensors, Objectives, Nanoimprint lithography

PROCEEDINGS ARTICLE | September 2, 2009
Proc. SPIE. 7443, Applications of Digital Image Processing XXXII
KEYWORDS: Telescopes, Microlens array, Image processing, Linear filtering, LCDs, Signal processing, Image filtering, Signal analysis, Lenticular lenses, Lawrencium

PROCEEDINGS ARTICLE | March 22, 2008
Proc. SPIE. 6922, Metrology, Inspection, and Process Control for Microlithography XXII
KEYWORDS: Optical imaging, Diffraction, Optical filters, Metrology, Image resolution, Image analysis, Process control, Objectives, Overlay metrology, Diffraction gratings

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