Ms. Shu-Ting Hsu
at Fraunhofer-Institut für Photonische Mikrosysteme
SPIE Involvement:
Author
Publications (3)

PROCEEDINGS ARTICLE | February 8, 2008
Proc. SPIE. 6887, MOEMS and Miniaturized Systems VII
KEYWORDS: Actuators, Mirrors, Silica, Etching, Scanners, Laser scanners, Projection systems, Photomasks, Semiconducting wafers, Prototyping

PROCEEDINGS ARTICLE | January 22, 2007
Proc. SPIE. 6466, MOEMS and Miniaturized Systems VI
KEYWORDS: Microelectromechanical systems, Actuators, Mirrors, Scanners, Crystals, Silicon, Reliability, Micromirrors, Photomicroscopy, Failure analysis

PROCEEDINGS ARTICLE | January 23, 2006
Proc. SPIE. 6114, MOEMS Display, Imaging, and Miniaturized Microsystems IV
KEYWORDS: Mirrors, Electrodes, Crystals, Silicon, Laser scanners, Microopto electromechanical systems, Micromirrors, Optical resolution, Optical simulations, Laser based displays

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