Ms. Shu-Ting Hsu Profile

Shu-Ting Hsu

at Fraunhofer-Institut für Photonische Mikrosysteme

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Publications (3)

Proceedings Article | 8 February 2008 Paper

Two dimensional microscanners with large horizontal-vertical scanning frequency ratio for high-resolution laser projectors

Shu-Ting Hsu, Thomas Klose, Christian Drabe, Harald Schenk

Proceedings Volume 6887, 688703 (2008) https://doi.org/10.1117/12.761617

KEYWORDS: Mirrors, Scanners, Projection systems, Etching, Prototyping, Silica, Photomasks, Semiconducting wafers, Actuators, Laser scanners

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Proceedings Article | 22 January 2007 Paper

Fracture strength of SOI springs in MEMS micromirrors

Shu-Ting Hsu, Alexander Wolter, Wolf-Dietrich Owe, Harald Schenk

Proceedings Volume 6466, 64660E (2007) https://doi.org/10.1117/12.698933

KEYWORDS: Reliability, Mirrors, Micromirrors, Silicon, Scanners, Microelectromechanical systems, Failure analysis, Actuators, Photomicroscopy, Crystals

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Proceedings Article | 23 January 2006 Paper

Scanning 2D micromirror with enhanced flatness at high frequency

Alexander Wolter, Thomas Klose, Shu-Ting Hsu, Harald Schenk, Hubert Lakner

Proceedings Volume 6114, 61140L (2006) https://doi.org/10.1117/12.654478

KEYWORDS: Mirrors, Micromirrors, Laser based displays, Laser scanners, Crystals, Silicon, Optical resolution, Microopto electromechanical systems, Electrodes, Optical simulations

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