Prof. Shu Yang
Professor at Univ of Pennsylvania
SPIE Involvement:
Conference Program Committee | Author
Publications (6)

PROCEEDINGS ARTICLE | March 9, 2016
Proc. SPIE. 9713, Three-Dimensional and Multidimensional Microscopy: Image Acquisition and Processing XXIII
KEYWORDS: Optical imaging, Lithography, Refractive index, Super resolution, Imaging systems, Capillaries, Microscopy, Optical microscopy, Image resolution, Materials science, Photonics, Objectives, Resolution enhancement technologies

PROCEEDINGS ARTICLE | February 16, 2009
Proc. SPIE. 7223, Photonic and Phononic Crystal Materials and Devices IX
KEYWORDS: Diamond, Modulation, Nanoparticles, Silicon, Physics, Photonic crystals, Scanning electron microscopy, Tolerancing, Nanolithography, Diamond patterning

PROCEEDINGS ARTICLE | February 14, 2009
Proc. SPIE. 7223, Photonic and Phononic Crystal Materials and Devices IX
KEYWORDS: Lithography, Holography, Silica, Polymers, Crystals, Silicon, Photonic crystals, Distortion, Photoresist materials, Refraction

PROCEEDINGS ARTICLE | February 6, 2007
Proc. SPIE. 6480, Photonic Crystal Materials and Devices VI
KEYWORDS: Lithography, Holography, Silica, Polymers, Crystals, Silicon, Photonic crystals, Chemical vapor deposition, Scanning electron microscopy, Silicon photonics

PROCEEDINGS ARTICLE | September 14, 2006
Proc. SPIE. 6331, Linear and Nonlinear Optics of Organic Materials VI
KEYWORDS: Carbon, Diffraction, Refractive index, Polymers, Metals, Glasses, Silicon, Photonic crystals, Chemical vapor deposition, Infrared radiation

PROCEEDINGS ARTICLE | June 11, 1999
Proc. SPIE. 3678, Advances in Resist Technology and Processing XVI
KEYWORDS: Lithography, Optical lithography, Backscatter, Polymers, Matrices, Spectroscopy, Interfaces, Silicon, Photoresist materials, Ion beams

Showing 5 of 6 publications
Conference Committee Involvement (2)
Nanofabrication: Technologies, Devices, and Applications II
23 October 2005 | Boston, MA, United States
Nanofabrication: Technologies, Devices, and Applications
25 October 2004 | Philadelphia, Pennsylvania, United States
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