Dr. Shuaigang Xiao
Research Staff Member at Seagate Technology LLC
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 19 March 2015
Proc. SPIE. 9423, Alternative Lithographic Technologies VII
KEYWORDS: Optical lithography, Etching, Polymers, Oxygen, Directed self assembly, Plasma etching, Picosecond phenomena, Nanoimprint lithography, Reactive ion etching, Plasma

SPIE Journal Paper | 12 August 2014
JM3 Vol. 13 Issue 03
KEYWORDS: Servomechanisms, Beam propagation method, Scanning electron microscopy, Quartz, Magnetism, Nanoimprint lithography, Etching, Optical lithography, Lithography, Directed self assembly

SPIE Journal Paper | 2 August 2013
JM3 Vol. 12 Issue 03
KEYWORDS: Spherical lenses, Magnetism, Picosecond phenomena, Servomechanisms, Quartz, Beam propagation method, Lithography, Nanoimprint lithography, Reactive ion etching, Directed self assembly

Proceedings Article | 24 March 2006
Proc. SPIE. 6151, Emerging Lithographic Technologies X
KEYWORDS: Electron beam lithography, Point spread functions, Electron beams, Scattering, Laser scattering, Magnetism, Monte Carlo methods, Head, Optical simulations, Photoresist processing

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