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Shubham Kumar
at KLA Software India Pvt Ltd
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Publications (1)
Proceedings Article | 23 March 2020 Paper
Optical defect inspection solution for EUV stochastics detection
Vidyasagar Anantha, Raghav Babulnath, Veikunth Kannan, Garima Sharma, Shubham Kumar, Kaushik Sah, Andrew Cross, Rahul Lakhawat, Hari Pathangi, Peter De Bisschop
Proceedings Volume 11323, 113231J (2020) https://doi.org/10.1117/12.2552452
KEYWORDS: Stochastic processes, Inspection, Extreme ultraviolet, Semiconducting wafers, Modulation, EUV optics, Defect inspection, Wafer-level optics, Defect detection
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