Mr. Shubhodeep Goswami Profile

Shubhodeep Goswami

at GE Research

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Publications (1)

Proceedings Article | 30 August 2019 Paper

Silicon Fresnel lens fabricated using greyscale lithography

Cheng-Po Chen, Jason Karp, Tim Toepfer, Oliver Boomhower, Jim Kretchmer, Shubhodeep Goswami, Sachin Dekate, Loucas Tsakalakos

Proceedings Volume 11104, 111040G (2019) https://doi.org/10.1117/12.2530649

KEYWORDS: Etching, Collimation, Silicon, Semiconductor lasers, Lens design, Grayscale lithography, Fresnel lenses, Photoresist materials, Scanning electron microscopy, Tolerancing

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