Dr. Shuichi Noda
at Tohoku Univ
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 17 November 2016
Proc. SPIE. 10027, Nanophotonics and Micro/Nano Optics III
KEYWORDS: Iron, Etching, Luminescence, Germanium, Ions, Gallium arsenide, Silicon, Nanolithography, Plasma, Nanowires

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