Dr. Shujie Liu
Associate Professor at Dalian University of Technology
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 6 December 2005
Proc. SPIE. 6049, Optomechatronic Sensors and Instrumentation
KEYWORDS: Semiconductors, Actuators, Thin films, Diamond, Interferometers, Semiconductor materials, Atomic force microscopy, Finite element methods, Chemical elements, Photoresist processing

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