Prof. Shuming Yang Profile

Prof. Shuming Yang

at Xi'an Jiaotong Univ

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 7 March 2019 Paper

Tong Wang, Tao Liu, Shuming Yang, Biyao Cheng, Qiang Liu, Kang Liu

Proceedings Volume 11053, 110534O (2019) https://doi.org/10.1117/12.2517191

KEYWORDS: Electron beam lithography, Diffractive optical elements, Fabrication, Diffraction, Genetic algorithms, Super resolution, Optical design

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Keywords/Phrases