Dr. Shun-Der Wu Profile

Dr. Shun-Der Wu

at ASML Taiwan Ltd

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Author

Publications (2)

Proceedings Article | 12 December 2009 Paper

Litho scenario solutions for FinFET SRAM 22nm node

Shih-En Tseng, Shun-Der Wu, Jacques Wang, Jay Kou, Orion Mouraille, Reiner Jungblut, Tsann-Bim Chiou, Jo Finders, Alek Chen, Mircea Dusa, Stephen Hsu

Proceedings Volume 7520, 752025 (2009) https://doi.org/10.1117/12.837495

KEYWORDS: Source mask optimization, Scanners, Photomasks, Reticles, Diffractive optical elements, Double patterning technology, Etching, Lithography, Error analysis

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SPIE Journal Paper | 1 January 2009

Litho-only double patterning approaches: positive–negative versus positive–positive tone

Michael Crouse, Ryusuke Uchida, Youri van Dommelen, Tomoyuki Ando, Emil Schmitt-Weaver, Masaru Takeshita, Shunder Wu, Robert Routh

JM3, Vol. 8, Issue 01, 011006, (January 2009) https://doi.org/10.1117/12.10.1117/1.3042219

KEYWORDS: Double patterning technology, Image processing, Nanoimprint lithography, Critical dimension metrology, Photoresist processing, Printing, Reticles, Cadmium, Lithography, Line width roughness

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