Mr. Shun-Yuan Chen Profile

Shun-Yuan Chen

at Taiwan Instrument Research Institute

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 27 December 2007 Paper

Shun-Yuan Chen, Heng-Cang Hu, Chih-Sheng Yu, Yi-Chiuen Hu

Proceedings Volume 6799, 67991A (2007) https://doi.org/10.1117/12.755340

KEYWORDS: Resistance, Coating, Adsorption, Proteins, Glasses, Optical lithography, Etching, Microfluidics, Liquids, Luminescence

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Keywords/Phrases