Dr. Shunquan Wang
at Shanghai Institute of Optics and Fine Mechanics
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | February 7, 2005
Proc. SPIE. 5636, Holography, Diffractive Optics, and Applications II
KEYWORDS: Diffraction, Holography, Silica, Polarization, Etching, Photoresist materials, Plasma etching, Dense wavelength division multiplexing, Plasma, Diffraction gratings

PROCEEDINGS ARTICLE | January 27, 2005
Proc. SPIE. 5645, Advanced Microlithography Technologies
KEYWORDS: Silica, Etching, Argon, Chemical species, Sputter deposition, Polymers, Ions, Photomasks, Chemical elements, Plasma

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