Shunsuke Mizutani
at Hitachi High-Tech Corp
SPIE Involvement:
Author
Publications (4)

SPIE Journal Paper | 6 April 2019
JM3 Vol. 18 Issue 02
KEYWORDS: Critical dimension metrology, Monte Carlo methods, Electron microscopes, Scanning electron microscopy, Cadmium, Edge detection, Silicon, Optical simulations, Metrology, Inspection

Proceedings Article | 26 March 2019 Paper
Proc. SPIE. 10959, Metrology, Inspection, and Process Control for Microlithography XXXIII
KEYWORDS: Extreme ultraviolet, Monte Carlo methods, Critical dimension metrology, Line edge roughness, Electrons, Spatial resolution, Extreme ultraviolet lithography, Metrology, Scanning electron microscopy

Proceedings Article | 13 March 2018 Paper
Proc. SPIE. 10585, Metrology, Inspection, and Process Control for Microlithography XXXII
KEYWORDS: Monte Carlo methods, Scanning electron microscopy, Cadmium, Silicon, Critical dimension metrology, Spatial resolution, Optical simulations, 3D metrology, Semiconductors, Laser scattering

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