Shunsuke Mizutani
at Hitachi High-Tech Science Corp
SPIE Involvement:
Author
Publications (3)

SPIE Journal Paper | 6 April 2019
JM3 Vol. 18 Issue 02
KEYWORDS: Critical dimension metrology, Monte Carlo methods, Electron microscopes, Scanning electron microscopy, Cadmium, Edge detection, Silicon, Optical simulations, Metrology, Inspection

Proceedings Article | 26 March 2019
Proc. SPIE. 10959, Metrology, Inspection, and Process Control for Microlithography XXXIII
KEYWORDS: Metrology, Electrons, Scanning electron microscopy, Monte Carlo methods, Extreme ultraviolet, Extreme ultraviolet lithography, Spatial resolution, Critical dimension metrology, Line edge roughness

Proceedings Article | 13 March 2018
Proc. SPIE. 10585, Metrology, Inspection, and Process Control for Microlithography XXXII
KEYWORDS: Semiconductors, Cadmium, Silicon, Laser scattering, Scanning electron microscopy, Monte Carlo methods, 3D metrology, Optical simulations, Spatial resolution, Critical dimension metrology

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