Dr. Shuo Zhao
Senior Engineer at HMI
SPIE Involvement:
Publications (5)

Proceedings Article | 20 March 2020 Paper
Eric Ma, Weiming Ren, Xinan Luo, Shuo Zhao, Xuerang Hu, Xuedong Liu, Chiyan Kuan, Kevin Chou, Martijn Maassen, Weihua Yin, Aiden Chen, Niladri Sen, Martin Ebert, Lei Liu, Fei Wang, Oliver Patterson
Proceedings Volume 11325, 113250F (2020) https://doi.org/10.1117/12.2553556
KEYWORDS: Defect detection, Image processing, Electrons, Inspection, Optical inspection, Semiconductor manufacturing, System integration, Semiconducting wafers, Image quality standards, Defect inspection

Proceedings Article | 19 March 2018 Presentation + Paper
Proceedings Volume 10583, 105830D (2018) https://doi.org/10.1117/12.2297027
KEYWORDS: Lithography, Diffraction, Scanners, Error analysis, Wavefronts, Zernike polynomials, Photomasks, Extreme ultraviolet lithography, Aberration theory, Overlay metrology

Proceedings Article | 4 October 2016 Paper
Shuo Zhao, Zhengqing John Qi
Proceedings Volume 9985, 998517 (2016) https://doi.org/10.1117/12.2245442
KEYWORDS: Multilayers, Finite-difference time-domain method, Coating, Printing, Photomasks, Extreme ultraviolet, Aluminum, Critical dimension metrology, Semiconducting wafers, Phase shifts

Proceedings Article | 5 October 2015 Presentation
Proceedings Volume 9565, 956505 (2015) https://doi.org/10.1117/12.2189490
KEYWORDS: Diffraction, Refractive index, Sun, Distortion, Nonlinear optics, Liquid crystals, Holmium, Nonlinear response, Electrostriction, Diffraction gratings

Proceedings Article | 7 October 2014 Paper
Proceedings Volume 9182, 91820U (2014) https://doi.org/10.1117/12.2060596
KEYWORDS: Refractive index, Switching, Transient nonlinear optics, Birefringence, Image processing, Polarizers, Nonlinear optics, Liquid crystals, Optical switching, Pulsed laser operation

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