Dr. Shuo Zhao
Senior Engineer at
SPIE Involvement:
Author
Publications (4)

PROCEEDINGS ARTICLE | March 19, 2018
Proc. SPIE. 10583, Extreme Ultraviolet (EUV) Lithography IX
KEYWORDS: Lithography, Diffraction, Scanners, Error analysis, Wavefronts, Zernike polynomials, Photomasks, Extreme ultraviolet lithography, Aberration theory, Overlay metrology

PROCEEDINGS ARTICLE | October 4, 2016
Proc. SPIE. 9985, Photomask Technology 2016
KEYWORDS: Multilayers, Finite-difference time-domain method, Coating, Printing, Photomasks, Extreme ultraviolet, Aluminum, Critical dimension metrology, Semiconducting wafers, Phase shifts

PROCEEDINGS ARTICLE | October 5, 2015
Proc. SPIE. 9565, Liquid Crystals XIX
KEYWORDS: Diffraction, Refractive index, Sun, Distortion, Nonlinear optics, Liquid crystals, Holmium, Nonlinear response, Electrostriction, Diffraction gratings

PROCEEDINGS ARTICLE | October 7, 2014
Proc. SPIE. 9182, Liquid Crystals XVIII
KEYWORDS: Refractive index, Switching, Transient nonlinear optics, Birefringence, Image processing, Polarizers, Nonlinear optics, Liquid crystals, Optical switching, Pulsed laser operation

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top