Dr. Shusuke Yoshitake
Group Manager at NuFlare Technology Inc
SPIE Involvement:
Conference Program Committee | Author
Publications (35)

PROCEEDINGS ARTICLE | March 20, 2018
Proc. SPIE. 10583, Extreme Ultraviolet (EUV) Lithography IX
KEYWORDS: Photomasks, Extreme ultraviolet, Nickel, Inspection, Signal to noise ratio, Extreme ultraviolet lithography, Phase measurement, Optical properties, Mirrors, Absorption

PROCEEDINGS ARTICLE | October 16, 2017
Proc. SPIE. 10450, International Conference on Extreme Ultraviolet Lithography 2017
KEYWORDS: Inspection, Diffraction, Extreme ultraviolet, Sensors, Defect inspection, Reticles, Defect detection, Signal to noise ratio, Photomasks, Reconstruction algorithms

SPIE Journal Paper | July 27, 2017
JM3 Vol. 16 Issue 04

PROCEEDINGS ARTICLE | March 28, 2017
Proc. SPIE. 10145, Metrology, Inspection, and Process Control for Microlithography XXXI
KEYWORDS: Extreme ultraviolet, Photomasks, Metrology, Sensors, Inspection, Extreme ultraviolet lithography, Reticles, Lithography, Scanners, High volume manufacturing, Diffraction, Photons, Scattering, Image restoration, Defect detection, Prototyping

PROCEEDINGS ARTICLE | March 27, 2017
Proc. SPIE. 10143, Extreme Ultraviolet (EUV) Lithography VIII
KEYWORDS: Photomasks, Extreme ultraviolet, Metrology, Coherence imaging, Inspection, Lithography, Microscopy, Defect detection, Extreme ultraviolet lithography, High volume manufacturing, Sensors, Diffraction, Mirrors, Charge-coupled devices, Spherical lenses, Image resolution

PROCEEDINGS ARTICLE | March 24, 2017
Proc. SPIE. 10143, Extreme Ultraviolet (EUV) Lithography VIII
KEYWORDS: Photomasks, Defect inspection, Extreme ultraviolet, Reticles, Microscopes, Inspection, Image resolution, Imaging systems, Scattering, Diffraction, Sensors, Defect detection, Prototyping

Showing 5 of 35 publications
Conference Committee Involvement (3)
Photomask Technology
17 September 2018 | Monterey, California, United States
Photomask Technology
11 September 2017 | Monterey, California, United States
Photomask Technology
12 September 2016 | San Jose, California, United States
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top