Shuuichi Nishikido
at Tokyo Electron Kyushu Ltd
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 31 March 2010 Paper
Yu Lin, Yoichi Tokunaga, Marlene Strobl, Kousuke Yoshihara, Zoe Hong, Shuuichi Nishikido
Proceedings Volume 7639, 763924 (2010) https://doi.org/10.1117/12.846488
KEYWORDS: Semiconducting wafers, Particles, Photoresist processing, Contamination, Image processing, Immersion lithography, Coating, Thin film coatings, Optical lithography, Head-mounted displays

Proceedings Article | 1 April 2009 Paper
S. Nishikido, Y. Tokunaga, T. Kitano, Marlene Strobl, Yu Chen Lin
Proceedings Volume 7273, 72730V (2009) https://doi.org/10.1117/12.814021
KEYWORDS: Semiconducting wafers, Particles, Optical lithography, Contamination, Inspection, Defect detection, Current controlled current source, Manufacturing, Coating, Sensors

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