Mr. Shuuichi Nishikido Profile

Shuuichi Nishikido

at Tokyo Electron Kyushu Ltd

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Publications (2)

Proceedings Article | 31 March 2010

Productivity improvement in the wafer bevel and backside cleaning before exposure

Yoichi Tokunaga, Shuuichi Nishikido, Kousuke Yoshihara, Zoe Hong, Marlene Strobl, Yu Lin

Proc. SPIE. 7639, Advances in Resist Materials and Processing Technology XXVII

KEYWORDS: Optical lithography, Contamination, Image processing, Particles, Coating, Immersion lithography, Head-mounted displays, Thin film coatings, Photoresist processing, Semiconducting wafers

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Proceedings Article | 1 April 2009

Productivity improvement in the wafer backside cleaning before exposure

S. Nishikido, T. Kitano, Y. Tokunaga, Marlene Strobl, Yu Chen Lin

Proc. SPIE. 7273, Advances in Resist Materials and Processing Technology XXVI

KEYWORDS: Optical lithography, Contamination, Defect detection, Sensors, Particles, Coating, Manufacturing, Inspection, Semiconducting wafers, Current controlled current source

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