Dr. Shuwen Guo Profile

Dr. Shuwen Guo

Senior Principal Engineer at Collins Aerospace

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Publications (1)

Proceedings Article | 15 January 2003 Paper

Cyclotene diaphragm for MEMS-based IR detectors

Shuwen Guo

Proceedings Volume 4979, (2003) https://doi.org/10.1117/12.472808

KEYWORDS: Sensors, Thermoelectric materials, Silicon, Infrared detectors, Plasma etching, Etching, Plasma, Semiconducting wafers, Infrared sensors, Antimony

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