Dr. Shuxian Susan Hu
Senior CAE
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 9 November 2005
Proc. SPIE. 5992, 25th Annual BACUS Symposium on Photomask Technology
KEYWORDS: Optical lithography, Manufacturing, Inspection, Computer simulations, Printing, Photomasks, Optical proximity correction, Semiconducting wafers, Resolution enhancement technologies, Defect inspection

Proceedings Article | 5 November 2005
Proc. SPIE. 5992, 25th Annual BACUS Symposium on Photomask Technology
KEYWORDS: Lithography, Reticles, Phase shifting, Etching, Manufacturing, Inspection, Computer simulations, Photomasks, Semiconducting wafers, Binary data

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