Dr. Shuyan Li
at Monash Univ
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | December 30, 2008
Proc. SPIE. 7270, Biomedical Applications of Micro- and Nanoengineering IV and Complex Systems
KEYWORDS: Thin films, Nanostructures, Nanostructuring, Polymers, Annealing, Silicon, Atomic force microscopy, Silicon films, Semiconducting wafers, Bacteria

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