Shuyi Gan
at Univ of Science and Technology of China
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 4 January 2008
Proc. SPIE. 6831, Nanophotonics, Nanostructure, and Nanometrology II
KEYWORDS: Optical components, Spatial frequencies, Scattering, Particles, Reflectivity, Surface roughness, Atomic force microscopy, Optical simulations, Mechanical engineering, Synchrotron technology

Proceedings Article | 27 November 2007
Proc. SPIE. 6723, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
KEYWORDS: Silica, Spatial frequencies, Glasses, Silicon, Surface roughness, Atomic force microscopy, Data acquisition, Semiconducting wafers, Probability theory, Spectral data processing

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