Shy-Jay Lin
Department manager at Taiwan Semiconductor Manufacturing Co Ltd
SPIE Involvement:
Conference Program Committee | Author
Publications (16)

Proceedings Article | 19 March 2015
Proc. SPIE. 9423, Alternative Lithographic Technologies VII
KEYWORDS: Optical fibers, Image compression, Data storage, Manufacturing, Chromium, Computer programming, Associative arrays, Algorithm development, Direct write lithography, Data analysis

Proceedings Article | 19 March 2015
Proc. SPIE. 9423, Alternative Lithographic Technologies VII
KEYWORDS: Electron beam lithography, Scattering, Scanners, Silicon, Distortion, Thermal effects, Finite element methods, Silicon carbide, Semiconducting wafers, Thermal modeling

Proceedings Article | 19 March 2015
Proc. SPIE. 9423, Alternative Lithographic Technologies VII
KEYWORDS: Electron beam lithography, Point spread functions, Backscatter, Scattering, Laser scattering, Feature extraction, Photomasks, Critical dimension metrology, Optimization (mathematics), Systems modeling

Proceedings Article | 28 March 2014
Proc. SPIE. 9049, Alternative Lithographic Technologies VI
KEYWORDS: Microelectromechanical systems, Electron beam lithography, Electron beams, Electrodes, Dielectrics, Coating, Reflectivity, Lens design, Atomic layer deposition, Structural design

Proceedings Article | 28 March 2014
Proc. SPIE. 9049, Alternative Lithographic Technologies VI
KEYWORDS: Lithography, Electron beam lithography, Mirrors, Data compression, Switching, Electrodes, Reflectivity, Printing, Error control coding, Semiconducting wafers

Proceedings Article | 9 September 2013
Proc. SPIE. 8880, Photomask Technology 2013
KEYWORDS: Lithography, Electron beam lithography, Electron beams, Data modeling, Backscatter, Scattering, Laser scattering, Monte Carlo methods, Photomasks, Critical dimension metrology

Showing 5 of 16 publications
Conference Committee Involvement (12)
Novel Patterning Technologies 2018
26 February 2018 | San Jose, California, United States
Emerging Patterning Technologies 2017
27 February 2017 | San Jose, California, United States
Alternative Lithographic Technologies VIII
22 February 2016 | San Jose, California, United States
Photomask Technology 2015
29 September 2015 | Monterey, California, United States
Alternative Lithographic Technologies VII
23 February 2015 | San Jose, California, United States
Showing 5 of 12 published special sections
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