Dr. Shyam Sridhar
at Tokyo Electron
SPIE Involvement:
Publications (4)

Proceedings Article | 1 May 2023 Presentation + Paper
Shuo Huang, Prem Panneerchelvam, Chad Huard, Shyam Sridhar, Peter L. Ventzek, Mark Smith
Proceedings Volume 12499, 1249905 (2023) https://doi.org/10.1117/12.2664977
KEYWORDS: Etching, Plasma, Calibration, Mathematical optimization, Inverse problems, Plasma etching, Silicon, 3D modeling, Modeling, Semiconducting wafers

Proceedings Article | 24 March 2020 Presentation
Iqbal Saraf, Shyam Sridhar, Christopher Catano, Sergey Voronin, Dexin Kong, Soon-Cheon Seo, Youngseok Kim, Takashi Ando, Nicole Saulnier, Vijay Narayanan
Proceedings Volume 11329, 113290N (2020) https://doi.org/10.1117/12.2552035

Proceedings Article | 20 March 2019 Paper
Christopher Catano, Nicholas Joy, Christopher Talone, Shyam Sridhar, Sergey Voronin, Peter Biolsi, Alok Ranjan
Proceedings Volume 10963, 109630E (2019) https://doi.org/10.1117/12.2514566
KEYWORDS: Silicon, Etching, Germanium, Plasmas, Interfaces, Isotropic etching, Nanowires, Transistors, 3D applications

Proceedings Article | 20 March 2018 Paper
Shyam Sridhar, Andrew Nolan, Li Wang, Erdinc Karakas, Sergey Voronin, Peter Biolsi, Alok Ranjan
Proceedings Volume 10589, 1058908 (2018) https://doi.org/10.1117/12.2297418
KEYWORDS: Etching, Plasmas, Dry etching, Oxides, Oxygen, Plasma treatment

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