Dr. Shyam Sridhar
at TEL Technology Ctr America LLC
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 20 March 2019
Proc. SPIE. 10963, Advanced Etch Technology for Nanopatterning VIII
KEYWORDS: 3D applications, Etching, Germanium, Interfaces, Silicon, Plasmas, Transistors, Isotropic etching, Nanowires

Proceedings Article | 20 March 2018
Proc. SPIE. 10589, Advanced Etch Technology for Nanopatterning VII
KEYWORDS: Oxides, Etching, Dry etching, Plasmas, Oxygen, Plasma treatment

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