Ms. Tan Siew Leng Profile

Tan Siew Leng

at National Metrology Ctr

SPIE Involvement:

Author

SPIE Journal Paper | 12 March 2012

Evaluation of a vertical piezoelectric transducer stage using a large range metrological atomic force microscope

Shihua Wang, Siew Leng Tan, Gan Xu

JM3, Vol. 11, Issue 1, 011005, (March 2012) https://doi.org/10.1117/12.10.1117/1.JMM.11.1.011005

KEYWORDS: Ferroelectric materials, Calibration, Metrology, Interferometers, Atomic force microscopy, Atomic force microscope, Transducers, Mirrors, Sensors, Motion measurement

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Proceedings Article | 1 June 2011 Paper

Study of a large range metrological atomic force microscope applied for calibration of a vertical PZT stage

S. Wang, S. Tan, G. Xu

Proceedings Volume 8036, 80360R (2011) https://doi.org/10.1117/12.883334

KEYWORDS: Ferroelectric materials, Calibration, Atomic force microscopy, Metrology, Interferometers, Atomic force microscope, Sensors, Mirrors, Thermography, Helium neon lasers

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SPIE Journal Paper | 1 January 2011

Multilaboratory comparison of traceable atomic force microscope measurements of a 70-nm grating pitch standard

Ronald Dixson, Donald Chernoff, Shihua Wang, Theodore Vorburger, Siew-Leng Tan, Ndubuisi Orji, Joseph Fu

JM3, Vol. 10, Issue 1, 013015, (January 2011) https://doi.org/10.1117/12.10.1117/1.3549914

KEYWORDS: Calibration, Metrology, Atomic force microscope, Atomic force microscopy, Standards development, Error analysis, Interferometry, Scanners, Interferometers, Helium neon lasers

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Proceedings Article | 10 June 2010 Paper

Interlaboratory comparison of traceable atomic force microscope pitch measurements

Ronald Dixson, Donald Chernoff, Shihua Wang, Theodore Vorburger, Siew Leng Tan, Ndubuisi Orji, Joseph Fu

Proceedings Volume 7729, 77290M (2010) https://doi.org/10.1117/12.858353

KEYWORDS: Calibration, Metrology, Atomic force microscopy, Atomic force microscope, Error analysis, Standards development, Interferometers, Scanners, Helium neon lasers, Head

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Proceedings Article | 3 October 2008 Paper

Evaluation on the probing error of a micro-coordinate measuring machine

Z. X. Chao, S. L. Tan, G. Xu

Proceedings Volume 7155, 71550K (2008) https://doi.org/10.1117/12.814519

KEYWORDS: Optical spheres, 3D metrology, Uncertainty analysis, Silicon, Laser interferometry, Standards development, Signal detection, Manufacturing, Sensors, Control systems

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Proceedings Article | 3 October 2008 Paper

Development of a metrological atomic force microscope for nano-scale standards calibration

S. H. Wang, G. Xu, S. L. Tan

Proceedings Volume 7155, 71550I (2008) https://doi.org/10.1117/12.814517

KEYWORDS: Atomic force microscopy, Metrology, Calibration, Standards development, Head, Interferometers, Atomic force microscope, Sensors, Scanning probe microscopy, Crystals

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Proceedings Article | 22 October 2001 Paper

Recent length and angle comparisons in Asia Pacific

Siew Leng Tan, Siok Pheng Low, Nicholas Brown, John Miles, Shige Iwasaki, Katuo Seta

Proceedings Volume 4401, (2001) https://doi.org/10.1117/12.445621

KEYWORDS: Glasses, Standards development, Metrology, Interferometers, Scientific research, Ceramics, Optical testing, Image processing, Manufacturing, Analytical research

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Proceedings Article | 2 November 2000 Paper

Calibration tool for a CCD-camera-based vision system

Gan Xu, Siew Leng Tan, Siok Pheng Low, Yee Heng, Weng Lai, Xianhe Du

Proceedings Volume 4099, (2000) https://doi.org/10.1117/12.405815

KEYWORDS: Calibration, CCD cameras, Semiconducting wafers, Microscopes, Imaging systems, Interferometers, Silicon, Ultraviolet radiation, Semiconductors, Glasses

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Showing 5 of 8 publications

Conference Committee Involvement (2)

Recent Developments in Traceable Dimensional Measurements III

31 July 2005 | San Diego, California, United States

Recent Developments in Traceable Dimensional Measurements II

4 August 2003 | San Diego, California, United States

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