A single mirror 2D laser scanner is designed, produced and tested in the paper. The mirror of the scanner is suspended on
a compact cross blade flexure and driven by four voice coil actuators. The voice coil actuators designed specially can
output strong driving force and have sufficient large gap for mirror's deflection. An in-house ingenious deflection angle
detecting system based on a 2D position sensitive detector provides feedback to enable two-axis closed-loop scanning.
Details of the voice coil actuators design, the mechanical structure design and deflection angle detecting system as well
as the control-loop implementation are described. Test results shows that the mechanical deflection angles in both
azimuth and elevation are about ±5°, and the closed-loop bandwidth is 350Hz. The diameter of the mirror is 40mm, and
the diameter of laser beam can reach 35mm when mechanical scanning angle is 5°. A 2D scanning is realized by the
scanner deflecting in two orthogonal axes. The vertical scanning frequency is 10Hz, and the scanning wave is triangle
wave. At the same time, the horizontal scanning frequency is 80Hz, and the scanning wave is sine wave.
Rotational prisms or reflectors are used for conventional optical scanners. Their disadvantages are large size, low scanning speed and high power consumption. In the paper a microoptical scanner based on the integration of piezoelectrical driver and microlens arrays is described. The microlens arrays consist of a convex microlens array and a cocave microlens array with 256×256 elements respectively. Each element dimension is 50×50 μm2. The scanner is driven by a piezoelectrical(PZT) crystal. A PA90 amplifier is controlled by an input signal produced by a single chip computer. The amplifier supplies a high voltage pulse signal to driving the PZT. The scanning frequency can reach 200Hz to 300Hz and the scanner's size is a few cubic centimeters.