Dr. Sikun Li
at Shanghai Institute of Optics and Fine Mechanics
SPIE Involvement:
Publications (26)

SPIE Journal Paper | 24 January 2019
JM3 Vol. 18 Issue 01
KEYWORDS: Particle filters, Filtering (signal processing), Thermal modeling, Particles, Semiconducting wafers, Projection systems, Lithography, Photomasks, Data modeling, Calibration

SPIE Journal Paper | 3 December 2018
JM3 Vol. 17 Issue 04
KEYWORDS: Photomasks, Optimization (mathematics), Extreme ultraviolet lithography, Computer programming, Computer simulations, Evolutionary algorithms, Lithography, Manufacturing, Lithium, High volume manufacturing

Proceedings Article | 2 November 2018 Paper
Proc. SPIE. 10819, Optical Metrology and Inspection for Industrial Applications V
KEYWORDS: Fringe analysis, Error analysis, Gaussian filters, 3D metrology, Projection systems, Phase measurement, Binary data, 3D image processing, Phase shifts

Proceedings Article | 9 August 2018 Paper
Proc. SPIE. 10806, Tenth International Conference on Digital Image Processing (ICDIP 2018)
KEYWORDS: Fringe analysis, Image processing, Digital filtering, Adaptive optics, 3D metrology, Image filtering, Image enhancement, Reconstruction algorithms, 3D image processing, Phase shifts

SPIE Journal Paper | 11 April 2018
JM3 Vol. 17 Issue 02
KEYWORDS: Projection systems, Lithography, Optical components, Optimization (mathematics), Thermal modeling, Refractive index, Photomasks, Optical design, Lithographic illumination, Thermography

Showing 5 of 26 publications
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