Dr. Sikun Li
at Shanghai Institute of Optics and Fine Mechanics
SPIE Involvement:
Author
Publications (25)

SPIE Journal Paper | December 3, 2018
JM3 Vol. 17 Issue 04
KEYWORDS: Photomasks, Optimization (mathematics), Extreme ultraviolet lithography, Computer programming, Computer simulations, Evolutionary algorithms, Lithography, Manufacturing, Lithium, High volume manufacturing

PROCEEDINGS ARTICLE | November 2, 2018
Proc. SPIE. 10819, Optical Metrology and Inspection for Industrial Applications V
KEYWORDS: Fringe analysis, Error analysis, Gaussian filters, 3D metrology, Projection systems, Phase measurement, Binary data, 3D image processing, Phase shifts

PROCEEDINGS ARTICLE | August 9, 2018
Proc. SPIE. 10806, Tenth International Conference on Digital Image Processing (ICDIP 2018)
KEYWORDS: Fringe analysis, Image processing, Digital filtering, Adaptive optics, 3D metrology, Image filtering, Image enhancement, Reconstruction algorithms, 3D image processing, Phase shifts

SPIE Journal Paper | April 11, 2018
JM3 Vol. 17 Issue 02
KEYWORDS: Projection systems, Lithography, Optical components, Optimization (mathematics), Thermal modeling, Refractive index, Photomasks, Optical design, Lithographic illumination, Thermography

SPIE Journal Paper | March 21, 2018
OE Vol. 57 Issue 03
KEYWORDS: Fringe analysis, Projection systems, Calibration, Lithium, Nonlinear optics, Metrology, Optical engineering, Statistical analysis, Coherence (optics), 3D metrology

PROCEEDINGS ARTICLE | March 20, 2018
Proc. SPIE. 10587, Optical Microlithography XXXI
KEYWORDS: Lithography, Optical lithography, Data modeling, Manufacturing, Particle filters, Projection systems, Semiconducting wafers, Thermal modeling

Showing 5 of 25 publications
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