Dr. Sillon Nicolas
at
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | January 20, 2003
Proc. SPIE. 4983, MOEMS and Miniaturized Systems III
KEYWORDS: Actuators, Mirrors, Etching, Dry etching, Electrodes, Polymers, Silicon, Adaptive optics, Deformable mirrors, Polymeric actuators

PROCEEDINGS ARTICLE | January 15, 2003
Proc. SPIE. 4979, Micromachining and Microfabrication Process Technology VIII
KEYWORDS: Microelectromechanical systems, Packaging, Etching, Metals, Glasses, Ceramics, Silicon, Manufacturing, Semiconducting wafers, Wafer bonding

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