Dr. Silu Chen
at Singapore Institute of Manufacturing Technology
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | March 4, 2015
Proc. SPIE. 9302, International Conference on Experimental Mechanics 2014
KEYWORDS: Mathematical modeling, Safety, Sensors, Control systems, Relays, Motion models, Feedback control, Semiconducting wafers, Systems modeling, Model-based design

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