The structure and optical properties of AlN thin films synthesized at 800°C by Pulsed Laser Deposition were studied in
terms of ambient nitrogen pressure (10<sup>-4</sup>-10 Pa) and post-deposition cooling rate (5-25°C/min). X-ray diffraction
patterns showed the films were polycrystalline with predominantly cubic phase and small-sized crystallites. The
refractive index and oscillator energies values were also characteristic of the polycrystalline AlN with cubic structure.