Dr. Silvia Schwyn Thoeny Profile

Dr. Silvia Schwyn Thoeny

Principal Scientist at Evatec AG

SPIE Involvement:

Conference Program Committee | Author

Proceedings Article | 24 November 2023 Presentation

Quantized nanolaminates of Ta2O5-SiO2 and amorphous silicon-SiO2 manufactured by magnetron sputter deposition

Silvia Schwyn Thoeny, Manuel Bärtschi, Marietta Batzer, Manuel Baselgia, Raphael Gmünder, Stephan Waldner

Proceedings Volume PC12726, PC127260N (2023) https://doi.org/10.1117/12.2682100

KEYWORDS: Sputter deposition, Silica, Tunable filters, Silicon, Refractive index, Manufacturing, Magnetrons, Absorption, Optics manufacturing, Optical coatings

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Proceedings Article | 28 September 2021 Presentation + Paper

Pre-production simulation of optical monitoring combining monochromatic and broadband monitoring strategies

Silvia Schwyn Thoeny, Daniel Schachtler, Stephan Waldner, Thomas Frei, Manuel Baertschi

Proceedings Volume 11872, 118720O (2021) https://doi.org/10.1117/12.2597085

KEYWORDS: Coating, Error analysis, Camera shutters, Optical simulations, Neodymium, Global system for mobile communications, Data processing, Tolerancing, Signal processing, Reflectivity

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Various types of optical monitoring systems are established in industry. They range from single wavelength, over monochromatic to broadband monitoring to calculate a monitoring signal, which allows to terminate each layer in a filter at the required thickness. State of the art monitoring systems offer the capability of monochromatic and broadband monitoring in a single device. With these technologies available, the question arises how to combine these monitoring strategies for a specific application in a way, which leads to accurate coating results with the least sensitivity to production errors and thus to the highest yield. To answer this question without the need to perform costly coating runs, we developed a software tool, which mimics all the monitoring features of Evatec’s GSM optical monitoring system. Additionally, the software is able to disturb the simulated ideal monitoring signal with errors such as detector noise, drifts, deviations in shutter delay times, etc. The values of these disturbances are specific to the deposition tool. They were determined based on the broadband spectra of actual coating runs. By starting a virtual coating run with defined disturbances, the thickness deviations expected with a selected strategy can be assessed and the development of thickness deviations during the run, i.e. error compensation and error accumulation can be simulated. Within the software, parameters for the termination of each layer can be varied individually and the effect on the coating result can be observed. In order to demonstrate the capability of this tool, a specific coating design was then selected. For this design various monitoring strategies were tested, broadband strategies with different wavelength ranges, monochromatic strategies varying wavelength assignment per layer but also mixed strategies of broadband and monochromatic monitoring. The most stable monitoring strategy resulting from these simulations was coated as well as some of the less promising candidates and their results were compared.

Proceedings Article | 23 November 2015 Paper

Comparative study of the laser damage threshold and optical characteristics of Ta2O5-SiO2 multilayers deposited using various methods

Roelene Botha, Silvia Schwyn Thöny, Martin Grössl, Safer Mourad, Clau Maissen, Jacobus Venter, Thomas Südmeyer, Martin Hoffmann, Pavel Bulkin, Sabine Linz-Dittrich, David Bischof, Markus Michler, Stefan Rinner, Andreas Ettemeyer

Proceedings Volume 9632, 963203 (2015) https://doi.org/10.1117/12.2194084

KEYWORDS: Manufacturing, Optical coatings, Polishing, Laser induced damage, Laser damage threshold, Silica, Multilayers, Optics manufacturing, Ion beams, Sputter deposition

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Proceedings Article | 23 September 2015 Paper

Combined deposition of optical interference coatings and wear resistant Diamond Like Carbon (DLC) in a novel box coater

Silvia Schwyn Thöny, Rico Benz, Andreas Frigg

Proceedings Volume 9627, 96270H (2015) https://doi.org/10.1117/12.2191204

KEYWORDS: Optical coatings, Silicon, Antireflective coatings, Infrared materials, Carbon, Diamond, Gases, Glasses, Ions, Infrared radiation

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Proceedings Article | 4 October 2011 Paper

Optimization of ion-assisted ITO films by design of experiment

Silvia Schwyn Thöny, Jürgen Buchholz, Stephan Waldner

Proceedings Volume 8168, 81681H (2011) https://doi.org/10.1117/12.896398

KEYWORDS: Transmittance, Resistance, Diffractive optical elements, Oxygen, Refractive index, Plasma, Surface roughness, Absorption, Reflectivity, Thin films

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Conference Committee Involvement (1)

Advances in Optical Thin Films VIII

8 April 2024 | Strasbourg, France

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