Prof. Simas Šakirzanovas Profile

Prof. Simas Šakirzanovas

at Vilnius Univ

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Author

Publications (11)

Proceedings Article | 5 March 2022 Presentation

Calcination: the enabler of next-gen additive inorganic 3D structuring

Darius Gailevicius, Greta Merkininkaite, Simas Sakirzanovas, Mangirdas Malinauskas

Proceedings Volume PC12012, PC120120T (2022) https://doi.org/10.1117/12.2608928

KEYWORDS: Metals, Lithography, Heat treatments, Glasses, Crystals, Tunable lasers, Transparency, Remote sensing, Refractive index, Photonics

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Proceedings Article | 8 March 2021 Presentation + Paper

Expansion of direct laser writing (DLW) capabilities for usage in biomedical applications

Linas Jonušauskas, Dovile Andrijec, Deividas Andriukaitis, Rokas Vargalis, Tomas Baravykas, Arūnas Stankevičius, Greta Merkininkaite, Arnoldas Pautienius, Henrikas Gricius, Egle Ežerskyte, Evelina Šimkutė, Agne Butkute, Juozas Grigas, Simas Šakirzanovas

Proceedings Volume 11677, 1167713 (2021) https://doi.org/10.1117/12.2579245

KEYWORDS: Multiphoton lithography, Medicine, Additive manufacturing, 3D applications, Standards development, Printing, Point-of-care devices, Nanolithography, Macromolecules, Femtosecond phenomena

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Proceedings Article | 5 March 2021 Presentation + Paper

Femtosecond surface structuring: wettability, friction control and surface chemistry

Gedvinas Nemickas, Deividas Čereška, Gabrielius Kontenis, Arnas Žemaitis, Greta Merkininkaite, Simas Šakirzanovas, Linas Jonušauskas

Proceedings Volume 11674, 116740Q (2021) https://doi.org/10.1117/12.2578355

KEYWORDS: Ultrafast lasers, Nanostructuring, Femtosecond phenomena, Ultrafast phenomena, Surface properties, Pulsed laser operation, Polarization, Medicine, Manufacturing, Light-matter interactions

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Proceedings Article | 5 March 2021 Presentation

Glassy free-form 3D micro-optics enabled via ultrafast laser 3D nanolithography

Simonas Varapnickas, Meguya Ryu, Darius Gailevicius, Tai Suzuki, Greta Merkininkaite, Simas Sakirzanovas, Junko Morikawa, Saulius Juodkazis, Mangirdas Malinauskas

Proceedings Volume 11696, 1169610 (2021) https://doi.org/10.1117/12.2578469

KEYWORDS: Ultrafast lasers, Nanolithography, Micro optics, Glasses, Transparency, Refractive index, Prisms, Polymers, Photorefractive polymers, Lenses

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Proceedings Article | 31 March 2020 Presentation

Preparation of 3D glass ceramic micro-/nanostructures by combining laser nanolithography with calcination (Conference Presentation)

Greta Merkininkaitė, Edvinas Aleksandravičius, Darius Gailevicius, Simonas Varapnickas, Mangirdas Malinauskas, Simas Šakirzanovas

Proceedings Volume 11349, 113490E (2020) https://doi.org/10.1117/12.2555838

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Ceramics play an important role in today’s science and industry as it can withstand immense thermal, mechanical, chemical and other hazards. In recent years, the interest in 3D printing micro- or even nano-structures out of ceramics has been growing rapidly. Therefore, direct laser writing by two photon polymerization together with calcination have been proved to be a powerful tool for the fabrication of fully 3D glass-ceramic objects in micro- and nano-scale [1]. However, producing such structures with unique properties at meso scale (features from nm to cm overall size) is one of the greatest challenges [2]. In order to overcome it the composition of the starting materials and as well as conditions of calcination have to be fully understood and enhanced. We synthesized a series of organic-inorganic polymer precursors via sol-gel method varying the molar ratio of silicon (Si) and zirconium (Zr) complexes (Si:Zr, where Si=9; 8; 7; 6; 5 and Zr=1; 2; 3; 4; 5) [3] and investigated 3D processing of these materials. The study shows that the “glassy” phase structures retain their shape without any distortion. Furthermore, calcination provides a route for the continuous size control and formation of a variety of phase transformation for free-form nano-/micro-objects. It is shown that due to the isotropic nature of the shrinkage during calcination fabricated 3D objects retain complex geometry. Nano-woodpiles, bulk-woodpile hybrids and full bulk structures are formed. The sizes of single features in these objects vary from 120 nm to 800 nm with overall size going to 30 µm. Finally, changes in focused ion beam machining rates between standard and calcinated materials are shown proving enhanced resiliency of the final product (up to 50%). [1] Gailevičius, D., et al., Additive-manufacturing of 3D glass-ceramics down to nanoscale resolution. Nanoscale Horiz.; 4, 647-651; (2019) [2] L. Jonusauskas, D. Gailevicius, S. Rekstyte, T. Baldacchini, S. Juodkazis, M. Malinauskas, Mesoscale Laser 3D Printing, Opt. Express 27 (11), 15205-15221 (2019) [3] Ovsianikov, A., et al., Ultra-Low Shrinkage Hybrid Photosensitive Material for Two-Photon Polymerization Microfabrication. ACS Nano; 2(11), 2257-2262; (2008)

Proceedings Article | 18 October 2019 Presentation

Nanoscale 3D laser additive manufacturing of highly resilient glass ceramics (Conference Presentation)

Darius Gailevičius, Greta Merkininkaite, Viktorija Padolskyte, Simonas Varapnickas, Meguya Ryu, Junko Morikawa, Vygantas Mizeikis, Simas Sakirzanovas, Saulius Juodkazis, Mangirdas Malinauskas

Proceedings Volume 11168, 111680F (2019) https://doi.org/10.1117/12.2532804

KEYWORDS: Lithography, Ultrafast lasers, Additive manufacturing, Spatial resolution, Optical properties, Thermography, Optical sensors, Environmental sensing

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Proceedings Article | 22 May 2018 Paper

3D opto-structuring of ceramics at nanoscale

Viktorija Padolskytė, Darius Gailevičius, Linas Jonušauskas, Lina Mikoliūnaitė, Tomas Katkus, Roaldas Gadonas, Simas Šakirzanovas, Vygantas Mizeikis, Kestutis Staliunas, Saulius Juodkazis, Mangirdas Malinauskas

Proceedings Volume 10675, 106750U (2018) https://doi.org/10.1117/12.2306883

KEYWORDS: Ceramics, Crystals, Nanolithography, Raman spectroscopy, Plasma etching, 3D printing, Dry etching, Biomedical optics, Laser applications, Glasses

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Ceramics as advanced materials play an important role in science and technology as they are mechanically robust, can withstand immense heat, are chemically inert. Consequently, there is a direct end-user driven need to find ways for efficiently acquiring free-form 3D ceramic structures. Recently, stereo-lithographic 3D printing of hybrid organic-inorganic photo-polymer and subsequent heating was demonstrated to be capable of providing true 3D ceramic and glass structures. Up to now, this was limited to (sub-)millimeter scale and naturally the next step is to acquire functional glass-/ceramic-like 3D structures in micro-/nano-dimensions. In this paper, we explore a possibility to apply ultrafast 3D laser nanolithography followed by heating to acquire ceramic 3D structures down to micro-/nano-dimension. Laser fabrication is employed for the production of initial 3D structures with varying (ranging within hundreds of nm) feature sizes out of hybrid organic-inorganic material SZ2080. Then, a post-fabrication heating at different temperatures up to 1500 °C in an air atmosphere facilitates metal-organic framework decomposition, which results in the glass-ceramic hybrid material. Additionally, annealing procedure densifies the obtained objects providing an extra route for size control. As we show, this can be applied to bulk and free-form objects. We uncover that the geometric downscaling can reach up to 40%, while the aspect ratio of single features, as well as filling ratio of the whole object, remains the same regardless of volume/surface-area ratio. The structures proved to be qualitatively resistant to dry etching, hinting at significantly increased resiliency. Finally, Raman spectrum and X-ray diffraction (XRD) analysis were performed in order to uncover undergoing chemical processes during heat-treatment in order to determine the composition of material obtained. Revealed physical and chemical properties prove the proposed approach paving a route towards 3D opto-structuring of ceramics at the nanoscale for diverse photonic, microfluidic and biomedical applications.

Proceedings Article | 16 March 2018 Paper

Local temperature measurement during ultrafast laser 3D nanolithography writing

S. Varapnickas, D. Baziulyte-Paulaviciene, L. Jonušauskas, S. Sakirzanovas, M. Malinauskas

Proceedings Volume 10520, 105201I (2018) https://doi.org/10.1117/12.2287826

KEYWORDS: Temperature metrology, Laser processing, 3D metrology, Multiphoton lithography, Polymerization, Scanning electron microscopy, 3D microstructuring, Nanolithography, In situ metrology, Laser damage threshold

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Proceedings Article | 22 February 2018 Presentation + Paper

Fabrication of 3D glass-ceramic micro- /nano-structures by direct laser writing lithography and pyrolysis

Darius Gailevičius, Simas Sakirzanovas, Viktorija Padolskyte, Subhashri Chatterjee, Linas Jonusauskas, Roaldas Gadonas, Kestutis Staliunas, Vygantas Mizeikis, Saulius Juodkazis, Mangirdas Malinauskas

Proceedings Volume 10544, 1054416 (2018) https://doi.org/10.1117/12.2282048

KEYWORDS: Heat treatments, Nanolithography, Lithography, Scanning electron microscopy, Reflectivity, Crystals, Multiphoton lithography, Ceramics, Glasses, Photonic crystals

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Glass-ceramics play an important role in todays science and industry as it can withstand immense heat, mechanical and other hazards. Consequently, there is a need to find ever-new ways to acquire more sophisticated free-form 3D ceramic and glass structures. Recently, stereo-lithographic 3D printing of hybrid organic-inorganic photopolymer and subsequent pyrolysis was demonstrated to be capable of providing true 3D ceramic and glass structures. However, such approach was limited to (sub-)millimeter scale, while one of the aims in the field is to acquire functional 3D glass-like structures in micro- or even nano-dimensions. In this paper, we explore a possibility to apply ultrafast 3D laser nanolithography in conjunction with pyrolysis to acquire glass-ceramic 3D structures in micro- and nano-scale. Laser fabrication allows production of initial 3D structures with relatively small (hundreds of nm) feature sizes out of hybrid organic-inorganic material SZ2080. Then, a post-fabrication heating at different temperatures up to 1000°C in Ar , air or O₂ atmospheres decomposes organic part of the material leaving only the glass-ceramic component of the hybrid. As we show, this can be done to 3D woodpiles and bulk objects. We uncover that the shrinkage during sintering can reach up to 40%, while the aspect ratio of single features as well as filling ratio of the whole object remains the same. This hints at homogeneous reduction in size that can be easily accounted for and pre-compensated before manufacturing. Additionally, the structures prove to be relatively resilient to focused ion beam (FIB) milling, hinting at increased rigidity. Finally, thermal gravimetric analysis (TGA) and Fourier transform infrared micro-spectroscopy measurements are performed in order to uncover undergoing chemical and physical phenomena during pyrolysis and composition of the remnant material. The proposed post-processing approach offers a straightforward way to downscale true 3D micro-/nanostructures for applications in nanophotonics, microoptics and mechanic devices with improved performance while being highly resilient to harsh surrounding conditions.

Proceedings Article | 2 January 2018 Paper

Upconverting nanocrystals as luminescent temperature probes for local-heating imaging during direct laser writing 3D nanolithography

Simonas Varapnickas, Dovilė Baziulytė-Paulavičienė, Simas Šakirzanovas, Mangirdas Malinauskas

Proceedings Volume 10456, 104564F (2018) https://doi.org/10.1117/12.2283224

KEYWORDS: Erbium, Ytterbium, Nanocrystals, Luminescence, Temperature metrology, Polymerization, Nanolithography, Ions, Polymers, Calibration

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Proceedings Article | 20 February 2017 Paper

Laser nanolithography and pyrolysis of SZ2080 hybrid for slowing light in 3D photonic crystals

Darius Gailevicius, Linas Jonušauskas, Danas Sakalauskas, Zeki Hayran, Hamza Kurt, Mirbek Turduev, Simas Šakirzanovas, Saulius Juodkazis, Vygantas Mizeikis, Roaldas Gadonas, Kestutis Staliunas, Mangirdas Malinauskas

Proceedings Volume 10115, 1011511 (2017) https://doi.org/10.1117/12.2250537

KEYWORDS: Photonic crystals, Polymers, Lithography, Ultrafast lasers, Heat treatments, Carbon, Nanolithography, Slow light, Inorganic hybrid materials, Organic hybrid materials, Argon, Scanning electron microscopy, Fabrication, Polymerization, Laser applications

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Showing 5 of 11 publications

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