Simon Chang
Group Member of Techn Staff at Texas Instruments Inc
SPIE Involvement:
Publications (11)

Proceedings Article | 16 March 2009 Paper
Steven Prins, James Blatchford, Oluwamuyiwa Olubuyide, Deborah Riley, Simon Chang, Qi-Zhong Hong, T. Kim, Ricardo Borges, Li Lin
Proceedings Volume 7275, 72750C (2009)
KEYWORDS: Transistors, Data modeling, Lithography, Process modeling, Computer simulations, Logic, 3D modeling, Device simulation, Manufacturing, Resolution enhancement technologies

Proceedings Article | 13 March 2009 Paper
Proceedings Volume 7275, 72750D (2009)
KEYWORDS: Metals, Lithography, Photomasks, Optical lithography, Logic, Raster graphics, Resolution enhancement technologies, Computer simulations, Distributed computing, Visualization

Proceedings Article | 17 March 2008 Paper
Proceedings Volume 6925, 692518 (2008)
KEYWORDS: Optical proximity correction, Semiconducting wafers, SRAF, Lithography, Photomasks, Optical lithography, Lithographic illumination, Image segmentation, Manufacturing, Fiber optic illuminators

Proceedings Article | 17 March 2008 Paper
Proceedings Volume 6925, 69250E (2008)
KEYWORDS: Lithography, SRAF, Photomasks, Logic, Optical proximity correction, Lithographic illumination, Printing, Critical dimension metrology, Design for manufacturing, Model-based design

Proceedings Article | 27 March 2007 Paper
Mark Terry, Gary Zhang, George Lu, Simon Chang, Tom Aton, Robert Soper, Mark Mason, Shane Best, Bill Dostalik, Stefan Hunsche, Jiang Wei Li, Rongchun Zhou, Mu Feng, Jim Burdorf
Proceedings Volume 6520, 65200S (2007)
KEYWORDS: Optical proximity correction, Metals, Photomasks, Model-based design, SRAF, Tolerancing, Critical dimension metrology, Lithography, Data modeling, Performance modeling

Showing 5 of 11 publications
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